Tesla power semiconductor device characterization system
(Technology News, 08 Jun 2007 )
Cascade Microtech announced its new Tesla power device characterization system. Tesla, unlike any other probing system, solves the on-wafer probing challenges for engineers and test technicians who need to characterize their power devices. The power semiconductor market is projected to grow from $25.8B in 2007 to $34.2B in 20091 fueled by the use of power devices in everything from industrial products to consumer electronics. The broad use of power semiconductors has created a pressing need to characterize devices quickly and efficiently. Design engineers and test technicians are under pressure to speed up the time-to-market for new power devices. To drive dramatic gains in productivity, Cascade Microtech designed Tesla, the industry's first power device measurement system providing a complete on-wafer solution for over-temperature, low contact resistance measurements of power semiconductors up to 60A and 3000V.
Cascade Microtech's Tesla system features two new wafer probes, including a high current probe that reduces the potential for probe and device destruction during testing. The probe can support an unprecedented 10A of current in continuous mode and up to 60A of current in pulsed mode. To reduce device heating, the probe tip is designed to minimize contact resistance at the wafer-to-probe interface.
The Tesla system also features a high voltage probe that ensures a high performance electrical measurement path at high voltages. The high voltage probe provides the capability to make coaxial measurements up to 3000V and triaxial measurements up to 1100V. In addition, both the high current and the high voltage probes feature a replaceable tip that is easily changed. The Tesla system's wafer chuck provides state-of-the-art handling for thin wafers. An exclusive chuck top technology provides the right amount of vacuum in a delicate method that protects against wafer breakage and probe damage, all while ensuring a minimal contact resistance.
