Axcelis Achieves Two New Design Wins from Chipmakers in Asia
(Interviews, 02 May 2007 )
Axcelis Technologies Inc. has received two new design wins for its Optima HD high dose ion implanter from two of the world's leading chipmakers located in Asia. The systems will ship during the second quarter of 2007.
"We are very excited about these two new penetrations of Optima HD technology," said Mary Puma, chairman and CEO, Axcelis. "With the Optima HD, we have demonstrated the ability to address a wide range of implant applications as well as meet the rigorous productivity demands of a high volume chip manufacturing environment. Axcelis has now penetrated foundries, memory and logic fabs with the Optima HD. It is quickly becoming the implanter of choice for customers requiring the most advanced technology, with maximum productivity and yield."
With the market's widest energy range of 200eV to 80KeV, the Optima HD is the only ion implant platform that addresses both conventional high dose implants and emerging applications like molecular and hydrogen implantation, which are increasingly important at the 45nm technology node and beyond. Further, Axcelis' advanced spot beam technology offers exceptional uniformity and repeatability.
