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Applied Precision Announces Automated Wafer-Handling Capabilities for the waferWoRx 300

(Interviews, 11 Jul 2007 )

Applied Precision LLC, a supplier of wafer probe test and yield improvement solutions for the semiconductor industry, has qualified the WaferMate300 by Chad Ind. as its recommended EFEM (Equipment Front-End Module) supplier for its waferWoRx 300 probing process analysis system.

"We are very pleased that Applied Precision has selected Chad to provide the wafer handling automation for the waferWoRx 300 product line," said Scott Klimczak, President of Chad. "Since the inception of the program over a year ago, the two companies have worked together seamlessly to bring to market the best possible integrated solution. We look forward to continued success as this partnership develops."

Automated wafer handling adds another dimension to the waferWoRx 300. On the test floor, speed is of the essence when you are performing analysis of production wafers. The waferWoRx 300 has scan times of up to 10,000 pads a minute. Coupling an automated wafer handling system to the waferWoRx 300 keeps the wafers in control, speeds up the process of analysis, and reduces the time an operator needs to interact with the tool.

"We selected Chad to supply the wafer handling automation for the waferWoRx 300 tool because of several factors, including Chad's superior product design, excellent project management and outstanding customer support," said Darren James, Applied Precision Product Line Manager. "Chad not only worked closely with our team to achieve a seamless integration of the EFEM and the waferWoRx 300 tool, but also with end-users to ensure a successful installation."

Through the analysis of scrub marks on the wafer pads, the waferWoRx 300 is able to quantify, segregate, and report on the error contribution of the elements in the probing process—probe card, wafer prober, tester interface, and test cell setup. Unlike probe mark inspection systems, the waferWoRx 300 enables root cause analysis and solution identification resulting in clear paths to yield improvement. With the addition of automation, the waferWoRx 300 is poised to become the industry standard for wafer test process management.

Applied Precision
Chad

 
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