To create new analytical and characterization methods required for next-generation chips particularly in the fields of semiconductor analysis and metrology,
AMD,
Carl Zeiss SMT and
Qimonda are launching an innovation center under the framework of a $17.5 million (Euro12 million) nanoanalysis project funded by the German Federal Ministry of Education and Research (BMBF).
At the newly-founded “Carl Zeiss Innovation Center Dresden,” ultrahigh resolution particle beam systems are being installed which use electron and ion beams instead of light to allow the imaging, analysis and processing of specimens down to the level of individual atoms.
As such, they play a decisive role in the characterization of 3-D semiconductor structures and in the development of new materials for chip fabrication, the group explained.
As chip manufacturers face the challenge of producing increasingly complex structures with smaller and smaller dimensions and maximum yield, process control at an atomic level plays a key role, noted AMD’s Dr. Udo Nothelfer, VP for its Fab 36. “Through our joint work in the Carl Zeiss Innovation Center Dresden, we have access to leading edge electron and ion microscopes and believe we can therefore further accelerate the introduction of new technologies. The experience gained in industrial utilization may be incorporated at an early stage in the development of future analytical systems.”
With its innovation center, Carl Zeiss said it is becoming involved in "Silicon Saxony," Europe’s microelectronics cluster, according to Dr. Dirk Stenkamp, member of the Carl Zeiss board of management.
Dr. Wolf-Dieter Lukas, head of the BMBF’s key technologies research for innovations department explained that the strategic setup and expansion of microelectronics competency centers is an important goal of the BMBF IKT2020 program.
“Only by setting targeted priorities in research funding will we succeed in maintaining Dresden’s leading role in high-tech chip production and in further expanding it through such innovative approaches as here in the field of nanoanalysis,” he said in a statement.
Further, with the structure dimensions now achieved, current storage cells can only be seen under the electron microscope, explained Frank Prein, managing director of Qimonda Dresden and senior VP of technology at Qimonda.
“Only through the consistent enhancement of the analytical and measuring methods will it be possible to master the future challenges posed by the development and production of state-of-the-art storage technologies. Through the diversified integration of research partners, Qimonda will use the excellence of the research location for its technology competency center in Dresden within the framework of the joint ‘Nanoanalysis’ project and expand and strengthen its scientific network,” Prein added.
The Carl Zeiss Innovation Center Dresden is available to all interested firms and institutes in the Dresden area, the group noted. In particular, all partners of “Silicon Saxony,” e.g. the Dresden Technical University or the Fraunhofer Center Nanoelectronic Technologies CNT, can resolve application problems in the field of nanotechnology.
