Ricor acquires InnerSense to expand its business into additional semiconductor segments
(Business News, 01 Apr 2008 )
Ricor Cryogenic & Vacuum Systems, a manufacturer of semiconductor manufacturing equipment, has just announced its acquisition of InnerSense Ltd. Ricor thus expands its activities from cryogenic equipment and purging solutions to diagnostic systems.
InnerSense has developed the “Smart Wafer” technology that provides engineers the means to record the forces acting on a wafer as it is handled by wafer fabrication equipment. This approach delivers a significant yield boost as it provides a statistical monitoring method for abnormal mechanical events in IC manufacturing and can be used as a cornerstone of an intelligent maintenance program (High Precision Maintenance) by routinely measuring equipment wear in a non invasive approach.
Ricor and InnerSense are now combining forces to extend the benefits of this technology to the global semiconductor and related markets.
