Pixer Technology announces Galileo for early reticle haze detection
(Product News, 18 Apr 2008 )
Pixer Technology Inc. (Pixer), a provider of Revolutionary Lithography Solutions for the semiconductor manufacturing industry, announced the utilization of it’s recently released Galileo system for early reticle haze detection.
In addition to being the industry’s first high speed, high-resolution DUV transmission metrology tool, Galileo has the ability to protect litho yields as a reticle requalification tool. Galileo has demonstrated its ability to detect haze-related transmission loss, while it is still a CD uniformity problem, rather than waiting for a defect-related yield crash. Galileo provides fabs a low cost of ownership, with typical reticle scan times of under an hour, and the ability to measure both single and multi-die reticles.
