Asyst Technologies has introduced Agile Automation, a new approach to Automated Material Handling in semiconductor Fabs.
Agile Automation is said to be a first-of-its-kind solution for the industry. It enables dramatic increases in fab productivity through modular enhancements to the existing AMHS system. Agile Automation provides the ability to load and unload several tools in parallel while substantially reducing dependency on OHT vehicles. This results in significantly shorter and more predictable FOUP delivery times and dramatic improvements in throughput and tool utilization.
Because of its flexible and modular architecture, Agile Automation easily integrates with standard factory automation systems in existing or Greenfield environments. This facilitates a managed, low-risk approach to fab productivity enhancement. Using Agile Automation Solutions, Fabs can obtain additional savings through reduced floor space requirements, potentially fewer tools and lower power consumption.
Agile Automation is the result of the integration of Asyst’s advanced hardware, software, and services capabilities, and permits customizable applications that seamlessly integrate within the Fab environment via standard industry interfaces. Asyst is integrating several new technologies as part of the Agile Automation solution. These include the DLT Lifting Loadport for OHT-independent tool loading, a key Asyst technology that allows automated loading and unloading of tools independent of a vehicle. Other new technologies and products include Asyst’s new Satellite StockerTM, which provides highly efficient near-tool buffering; the Velocity™ HTC conveyor, for high-speed, high-throughput material handling in both inter-bay and intra-bay applications; and Asyst’s new VAO software, which for the first time allows real-time visualization of fab processes and material flow. Agile Automation is supported by Asyst’s Global Services team.
Asyst already is producing Agile Automation solutions and supporting the products in the field. The company has installed its conveyor products in multiple production environments and recently won multiple Velocity conveyor orders from a major semiconductor foundry in Taiwan in a head-to-head runoff against a competitor’s standalone conveyor. The first customer installation of Asyst’s VAO software is in a very large memory fab in Japan. The company is also in the process of qualifying a customized Agile solution for a major foundry and a leading integrated device manufacturer.
Asyst
