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Low temp poly-silicon tool for FDP manufacturing
( 02 Nov 2005 )

TCZ GmbH and Carl Zeiss SMT AG have announced the TCZ 900X—a production tool for fabricating flat panel displays (FPD). The tool is designed to improve the throughput and reduce the cost of laser crystallization for LTPS (low temperature poly silicon) display manufacturers. Providing a better alternative to existing crystallization techniques such as Excimer Laser Annealing (ELA) and Sequential Lateral Solidification (SLS), the TCZ 900X offers reduced panel cost and higher picture resolution.

TCZ GmbH

www.teamcymerzeiss.com
 
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