Aviza Technology Inc.—a supplier of advanced semiconductor equipment and process technologies for the global semiconductor, compound semiconductor, nanotechnology and other related markets—announced the insertion of its next-generation single wafer atomic layer deposition (ALD) system, Celsior, in high volume 90-nm DRAM production with one of the world's largest DRAM suppliers
based in Europe.
Subrata Chatterji, vice president and general manager, ALD business unit of Aviza, said, "Aviza's Celsior ALD system offers the critical hardware and process capabilities demanded by this very precise deposition technology to satisfy chipmakers' stringent production requirements for 90-nm and below geometries. We believe Celsior offers the cost of ownership advantages and demonstrates the proven productivity that our customers seek."
Aviza Technology
